Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers

This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded Lorentz-force magnetometers (LFM). The multilayered metals and ox...

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Detalles Bibliográficos
Autores principales: Valle, J. J., Sánchez-Chiva, J. M., Fernández, D., Madrenas, J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9481614/
https://www.ncbi.nlm.nih.gov/pubmed/36124080
http://dx.doi.org/10.1038/s41378-022-00423-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9481614/
https://www.ncbi.nlm.nih.gov/pubmed/36124080
http://dx.doi.org/10.1038/s41378-022-00423-w

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