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Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded Lorentz-force magnetometers (LFM). The multilayered metals and ox...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9481614/ https://www.ncbi.nlm.nih.gov/pubmed/36124080 http://dx.doi.org/10.1038/s41378-022-00423-w |