AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical til...

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Detalles Bibliográficos
Autores principales: Liu, Yichen, Wang, Lihao, Su, Yongquan, Zhang, Yuyao, Wang, Yang, Wu, Zhenyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9504672/
https://www.ncbi.nlm.nih.gov/pubmed/36144173
http://dx.doi.org/10.3390/mi13091550
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author Liu, Yichen
Wang, Lihao
Su, Yongquan
Zhang, Yuyao
Wang, Yang
Wu, Zhenyu
author_facet Liu, Yichen
Wang, Lihao
Su, Yongquan
Zhang, Yuyao
Wang, Yang
Wu, Zhenyu
author_sort Liu, Yichen
collection PubMed
description This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical tilt angles of up to 22.6° @ 30 V, with a high resonance frequency of about 8.2 kHz, while the 3 mm mirror reached 48.5° @ 41 V. The mirror with the gimbaled structure exhibited an excellent field of view and good mechanical decoupling. Additionally, a significant improvement in mirror scanning performance was observed in a vacuum (4 Pa), proving that the optical field of view was magnified by more than a factor of 10.
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spelling pubmed-95046722022-09-24 AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application Liu, Yichen Wang, Lihao Su, Yongquan Zhang, Yuyao Wang, Yang Wu, Zhenyu Micromachines (Basel) Article This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical tilt angles of up to 22.6° @ 30 V, with a high resonance frequency of about 8.2 kHz, while the 3 mm mirror reached 48.5° @ 41 V. The mirror with the gimbaled structure exhibited an excellent field of view and good mechanical decoupling. Additionally, a significant improvement in mirror scanning performance was observed in a vacuum (4 Pa), proving that the optical field of view was magnified by more than a factor of 10. MDPI 2022-09-18 /pmc/articles/PMC9504672/ /pubmed/36144173 http://dx.doi.org/10.3390/mi13091550 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Liu, Yichen
Wang, Lihao
Su, Yongquan
Zhang, Yuyao
Wang, Yang
Wu, Zhenyu
AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
title AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
title_full AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
title_fullStr AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
title_full_unstemmed AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
title_short AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
title_sort alscn piezoelectric mems mirrors with large field of view for lidar application
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9504672/
https://www.ncbi.nlm.nih.gov/pubmed/36144173
http://dx.doi.org/10.3390/mi13091550
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AT wanglihao alscnpiezoelectricmemsmirrorswithlargefieldofviewforlidarapplication
AT suyongquan alscnpiezoelectricmemsmirrorswithlargefieldofviewforlidarapplication
AT zhangyuyao alscnpiezoelectricmemsmirrorswithlargefieldofviewforlidarapplication
AT wangyang alscnpiezoelectricmemsmirrorswithlargefieldofviewforlidarapplication
AT wuzhenyu alscnpiezoelectricmemsmirrorswithlargefieldofviewforlidarapplication

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