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AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical til...

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Detalles Bibliográficos
Autores principales:	Liu, Yichen, Wang, Lihao, Su, Yongquan, Zhang, Yuyao, Wang, Yang, Wu, Zhenyu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9504672/ https://www.ncbi.nlm.nih.gov/pubmed/36144173 http://dx.doi.org/10.3390/mi13091550

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