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Ultra-High-Sensitivity, Miniaturized Fabry-Perot Interferometric Fiber-Optic Microphone for Weak Acoustic Signals Detection
An ultra-high-sensitivity, miniaturized Fabry-Perot interferometric (FPI) fiber-optic microphone (FOM) has been developed, utilizing a silicon cantilever as an acoustic transducer. The volumes of the cavity and the FOM are determined to be 60 microliters and 102 cubic millimeters, respectively. The...
Autores principales: | Wu, Guojie, Li, Haie, Ye, Hongxin, Gong, Zhenfeng, Ma, Junsheng, Guo, Min, Chen, Ke, Peng, Wei, Yu, Qingxu, Mei, Liang |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9505396/ https://www.ncbi.nlm.nih.gov/pubmed/36146295 http://dx.doi.org/10.3390/s22186948 |
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