Design of a Multiple Folded-Beam Disk Resonator with High Quality Factor

This paper proposes a new multiple folded-beam disk resonator whose thermoelastic quality factor is significantly improved by appropriately reducing the beam width and introducing integral-designed lumped masses. The quality factor of the fabricated resonator with (100) single crystal silicon reache...

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Detalles Bibliográficos
Autores principales: Sun, Xiaopeng, Zhou, Xin, Yu, Lei, He, Kaixuan, Xiao, Dingbang, Wu, Xuezhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506510/
https://www.ncbi.nlm.nih.gov/pubmed/36144091
http://dx.doi.org/10.3390/mi13091468

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506510/
https://www.ncbi.nlm.nih.gov/pubmed/36144091
http://dx.doi.org/10.3390/mi13091468

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