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Design of a Multiple Folded-Beam Disk Resonator with High Quality Factor
This paper proposes a new multiple folded-beam disk resonator whose thermoelastic quality factor is significantly improved by appropriately reducing the beam width and introducing integral-designed lumped masses. The quality factor of the fabricated resonator with (100) single crystal silicon reache...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506510/ https://www.ncbi.nlm.nih.gov/pubmed/36144091 http://dx.doi.org/10.3390/mi13091468 |