Integrated optical-readout of a high-Q mechanical out-of-plane mode

The rapid development of high-Q(M) macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-Q(M) structures on a chip, while simultaneously achieving large coupling strengths through an optical read-out. Here, we present a versatile fabrication method, which allows us to build fully integrated optomechanical structures. We place a photonic crystal cavity directly above a mechanical resonator with high-Q(M) fundamental out-of-plane mode, separated by a small gap. The highly confined optical field has a large overlap with the mechanical mode, enabling strong optomechanical interaction strengths. Furthermore, we implement a novel photonic crystal design, which allows for a very large cavity photon number, a highly important feature for optomechanical experiments and sensor applications. Our versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device layout. Additionally, it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-Q(M) out-of-plane modes alike.