Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems

[Image: see text] Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstre...

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Detalles Bibliográficos
Autores principales: Navarro-Urrios, Daniel, Colombano, Martín F., Arregui, Guillermo, Madiot, Guilhem, Pitanti, Alessandro, Griol, Amadeu, Makkonen, Tapani, Ahopelto, Jouni, Sotomayor-Torres, Clivia M., Martínez, Alejandro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9523580/
https://www.ncbi.nlm.nih.gov/pubmed/36193113
http://dx.doi.org/10.1021/acsphotonics.1c01614

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