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Study of the ordered assembly morphologies of diblock copolymers on the same substrate

With the development of frontier technology in emerging semiconductor processes, self-assembling (SA) and directed self-assembly (DSA) of block copolymers (BCPs) have attracted great attention from scientific researchers and become promising candidates for advanced photolithography. Using an optimal...

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Detalles Bibliográficos
Autores principales:	Zhang, Baolin, Meng, Lingkuan, Li, Zili
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2022
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9533419/ https://www.ncbi.nlm.nih.gov/pubmed/36320541 http://dx.doi.org/10.1039/d2ra04803e

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