Atomic-level flatness on oxygen-free copper surface in lapping and chemical mechanical polishing

Oxygen-free copper (OFC) serves as a core component of high-end manufacturing, and requires high surface quality. It is always a significant challenge to manufacture high-quality atomic-level surfaces. In this study, SiO(2) nanospheres with good dispersibility were prepared and a late-model environm...

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Detalles Bibliográficos
Autores principales: Liu, Dongdong, Zhang, Zhenyu, Feng, Jiajian, Yu, Zhibin, Meng, Fanning, Xu, Guanghong, Wang, Jianmei, Wen, Wei, Liu, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2022
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9552898/
https://www.ncbi.nlm.nih.gov/pubmed/36321157
http://dx.doi.org/10.1039/d2na00405d

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9552898/
https://www.ncbi.nlm.nih.gov/pubmed/36321157
http://dx.doi.org/10.1039/d2na00405d

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