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Atomic-level flatness on oxygen-free copper surface in lapping and chemical mechanical polishing
Oxygen-free copper (OFC) serves as a core component of high-end manufacturing, and requires high surface quality. It is always a significant challenge to manufacture high-quality atomic-level surfaces. In this study, SiO(2) nanospheres with good dispersibility were prepared and a late-model environm...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
RSC
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9552898/ https://www.ncbi.nlm.nih.gov/pubmed/36321157 http://dx.doi.org/10.1039/d2na00405d |