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Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling
Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570529/ https://www.ncbi.nlm.nih.gov/pubmed/36236326 http://dx.doi.org/10.3390/s22197229 |
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author | Yang, Wenxuan Li, Wenchang Lu, Huaxiang Liu, Jian Zhang, Tianyi |
author_facet | Yang, Wenxuan Li, Wenchang Lu, Huaxiang Liu, Jian Zhang, Tianyi |
author_sort | Yang, Wenxuan |
collection | PubMed |
description | Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are difficult to ensure compatability with the CMOS process. The dynamic compensation method can shorten the response time by only adding digital circuits or software processing. However, conventional compensation technology is not suitable for humidity sensors due to temperature coupling. This paper proposes a new dynamic compensation method for humidity sensors based on the decoupling of temperature factors by analyzing the coupling relationship between sensor dynamic characteristics and temperature. Simulations and experiments were used to verify the proposed method. The experimental results show that the proposed method reduces the humidity response time of the sensor by 85.6%. The proposed method can effectively shorten the response time of humidity sensors. |
format | Online Article Text |
id | pubmed-9570529 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-95705292022-10-17 Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling Yang, Wenxuan Li, Wenchang Lu, Huaxiang Liu, Jian Zhang, Tianyi Sensors (Basel) Article Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are difficult to ensure compatability with the CMOS process. The dynamic compensation method can shorten the response time by only adding digital circuits or software processing. However, conventional compensation technology is not suitable for humidity sensors due to temperature coupling. This paper proposes a new dynamic compensation method for humidity sensors based on the decoupling of temperature factors by analyzing the coupling relationship between sensor dynamic characteristics and temperature. Simulations and experiments were used to verify the proposed method. The experimental results show that the proposed method reduces the humidity response time of the sensor by 85.6%. The proposed method can effectively shorten the response time of humidity sensors. MDPI 2022-09-23 /pmc/articles/PMC9570529/ /pubmed/36236326 http://dx.doi.org/10.3390/s22197229 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Yang, Wenxuan Li, Wenchang Lu, Huaxiang Liu, Jian Zhang, Tianyi Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling |
title | Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling |
title_full | Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling |
title_fullStr | Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling |
title_full_unstemmed | Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling |
title_short | Dynamic Compensation Method for Humidity Sensors Based on Temperature and Humidity Decoupling |
title_sort | dynamic compensation method for humidity sensors based on temperature and humidity decoupling |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570529/ https://www.ncbi.nlm.nih.gov/pubmed/36236326 http://dx.doi.org/10.3390/s22197229 |
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