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A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is car...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570841/ https://www.ncbi.nlm.nih.gov/pubmed/36236692 http://dx.doi.org/10.3390/s22197593 |
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author | Wang, Honghui Zou, Dingkang Peng, Peng Yao, Guangle Ren, Jizhou |
author_facet | Wang, Honghui Zou, Dingkang Peng, Peng Yao, Guangle Ren, Jizhou |
author_sort | Wang, Honghui |
collection | PubMed |
description | This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is carried out, and the relationship between the structural parameters of the sensor and the stress is analyzed by finite element simulation and curve-fitting prediction, and then the optimal structural parameters are also analyzed. The simulation results indicate that the sensor with the CCSB structure proposed in this article obtained a high sensitivity of 87.74 μV/V/MPA and a low nonlinearity error of 0.28% full-scale span (FSS) within the pressure range of 0–200 MPa. Compared with All-Si Bulk, grooved All-Si Bulk, Si-Glass Bulk, silicon diaphragm, resistance strain gauge, and Fiber Bragg grating structure pressure sensors, the designed sensor has a significant improvement in sensitivity and nonlinearity error. It can be used as a new sensor for rock disaster (such as collapse) monitoring and forecasting. |
format | Online Article Text |
id | pubmed-9570841 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-95708412022-10-17 A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing Wang, Honghui Zou, Dingkang Peng, Peng Yao, Guangle Ren, Jizhou Sensors (Basel) Article This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is carried out, and the relationship between the structural parameters of the sensor and the stress is analyzed by finite element simulation and curve-fitting prediction, and then the optimal structural parameters are also analyzed. The simulation results indicate that the sensor with the CCSB structure proposed in this article obtained a high sensitivity of 87.74 μV/V/MPA and a low nonlinearity error of 0.28% full-scale span (FSS) within the pressure range of 0–200 MPa. Compared with All-Si Bulk, grooved All-Si Bulk, Si-Glass Bulk, silicon diaphragm, resistance strain gauge, and Fiber Bragg grating structure pressure sensors, the designed sensor has a significant improvement in sensitivity and nonlinearity error. It can be used as a new sensor for rock disaster (such as collapse) monitoring and forecasting. MDPI 2022-10-07 /pmc/articles/PMC9570841/ /pubmed/36236692 http://dx.doi.org/10.3390/s22197593 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Wang, Honghui Zou, Dingkang Peng, Peng Yao, Guangle Ren, Jizhou A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
title | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
title_full | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
title_fullStr | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
title_full_unstemmed | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
title_short | A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing |
title_sort | novel high-sensitivity mems pressure sensor for rock mass stress sensing |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570841/ https://www.ncbi.nlm.nih.gov/pubmed/36236692 http://dx.doi.org/10.3390/s22197593 |
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