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A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing

This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is car...

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Detalles Bibliográficos
Autores principales: Wang, Honghui, Zou, Dingkang, Peng, Peng, Yao, Guangle, Ren, Jizhou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570841/
https://www.ncbi.nlm.nih.gov/pubmed/36236692
http://dx.doi.org/10.3390/s22197593
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author Wang, Honghui
Zou, Dingkang
Peng, Peng
Yao, Guangle
Ren, Jizhou
author_facet Wang, Honghui
Zou, Dingkang
Peng, Peng
Yao, Guangle
Ren, Jizhou
author_sort Wang, Honghui
collection PubMed
description This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is carried out, and the relationship between the structural parameters of the sensor and the stress is analyzed by finite element simulation and curve-fitting prediction, and then the optimal structural parameters are also analyzed. The simulation results indicate that the sensor with the CCSB structure proposed in this article obtained a high sensitivity of 87.74 μV/V/MPA and a low nonlinearity error of 0.28% full-scale span (FSS) within the pressure range of 0–200 MPa. Compared with All-Si Bulk, grooved All-Si Bulk, Si-Glass Bulk, silicon diaphragm, resistance strain gauge, and Fiber Bragg grating structure pressure sensors, the designed sensor has a significant improvement in sensitivity and nonlinearity error. It can be used as a new sensor for rock disaster (such as collapse) monitoring and forecasting.
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spelling pubmed-95708412022-10-17 A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing Wang, Honghui Zou, Dingkang Peng, Peng Yao, Guangle Ren, Jizhou Sensors (Basel) Article This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is carried out, and the relationship between the structural parameters of the sensor and the stress is analyzed by finite element simulation and curve-fitting prediction, and then the optimal structural parameters are also analyzed. The simulation results indicate that the sensor with the CCSB structure proposed in this article obtained a high sensitivity of 87.74 μV/V/MPA and a low nonlinearity error of 0.28% full-scale span (FSS) within the pressure range of 0–200 MPa. Compared with All-Si Bulk, grooved All-Si Bulk, Si-Glass Bulk, silicon diaphragm, resistance strain gauge, and Fiber Bragg grating structure pressure sensors, the designed sensor has a significant improvement in sensitivity and nonlinearity error. It can be used as a new sensor for rock disaster (such as collapse) monitoring and forecasting. MDPI 2022-10-07 /pmc/articles/PMC9570841/ /pubmed/36236692 http://dx.doi.org/10.3390/s22197593 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Honghui
Zou, Dingkang
Peng, Peng
Yao, Guangle
Ren, Jizhou
A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
title A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
title_full A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
title_fullStr A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
title_full_unstemmed A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
title_short A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
title_sort novel high-sensitivity mems pressure sensor for rock mass stress sensing
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570841/
https://www.ncbi.nlm.nih.gov/pubmed/36236692
http://dx.doi.org/10.3390/s22197593
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