A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing

This paper proposes a novel high-sensitivity micro-electromechanical system (MEMS) piezoresistive pressure sensor that can be used for rock mass stress monitoring. The entire sensor consists of a cross, dual-cavity, and all-silicon bulk-type (CCSB) structure. Firstly, the theoretical analysis is car...

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Detalles Bibliográficos
Autores principales: Wang, Honghui, Zou, Dingkang, Peng, Peng, Yao, Guangle, Ren, Jizhou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570841/
https://www.ncbi.nlm.nih.gov/pubmed/36236692
http://dx.doi.org/10.3390/s22197593

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570841/
https://www.ncbi.nlm.nih.gov/pubmed/36236692
http://dx.doi.org/10.3390/s22197593

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