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Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering

The paper presents the results of an investigation of the influence of technological parameters on the microstructure, optical, electrical and nanomechanical properties of zinc oxide coatings prepared using the pulsed reactive magnetron sputtering method. Three sets of ZnOx thin films were deposited...

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Detalles Bibliográficos
Autores principales:	Mazur, Michał, Obstarczyk, Agata, Posadowski, Witold, Domaradzki, Jarosław, Kiełczawa, Szymon, Wiatrowski, Artur, Wojcieszak, Damian, Kalisz, Małgorzata, Grobelny, Marcin, Szmidt, Jan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9571499/ https://www.ncbi.nlm.nih.gov/pubmed/36233893 http://dx.doi.org/10.3390/ma15196551

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