Study on the Grooved Morphology of CMC-SiC(f)/SiC by Dual-Beam Coupling Nanosecond Laser

Due to the excellent properties of high hardness, oxidation resistance, and high-temperature resistance, silicon carbide fiber reinforced silicon carbide ceramic matrix composite (CMC-SiC(f)/SiC) is a typical difficult-to-process material. In this paper, according to the relationship between the spatial posture of dual beams and the direction of the machining path, two kinds of scanning methods were set up. The CMC-SiC(f)/SiC grooving experiments were carried out along different feeding directions (transverse scanning and longitudinal scanning) by using a novel dual-beam coupling nanosecond laser, and the characteristics of grooving morphology were observed by Laser Confocal Microscope, Scanning Electron Microscopy (SEM), and Energy Dispersive Spectrometer (EDS). The results show that the transverse scanning grooving section morphology is V shape, and the longitudinal scanning groove section morphology is W shape. The grooving surface depth and width of transverse scanning are larger and smaller than that of longitudinal scanning when the laser parameters are the same. The depth of the transverse grooving is greater than that of the longitudinal grooving when the laser beam is transverse and longitudinal scanning, the maximum grooving depth is approximately 145.39 μm when the laser energy density is 76.73 J/cm(2), and the minimum grooving depth is approximately 83.76 μm when the laser energy density is about 29.59 J/cm(2). The thermal conductivity of fiber has a significant effect on the local characteristics of the grooved morphology when using a medium energy density grooving. The obvious recasting layer is produced after the laser is applied to CMC-SiC(f)/SiC when using a high energy density laser grooving, which directly affects the grooved morphology.