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Optical and Electrical Characterization of Visible Parylene Films

Poly-dichloro-para-xylylene (parylene-C) film is formed through a chemical vapor deposition process, where monomeric gases are polymerized on the target surface at room temperature and are used as transparent insulating coating films. The thin parylene-C films exhibit uniform conformal layers even w...

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Detalles Bibliográficos
Autores principales:	Lee, Ye-Seul, Yoon, Ji-Hyeon, Raji, Akeem, Baek, Seung-Yo, Choi, Yoonseuk, Lee, Jonghee, Gasonoo, Akpeko, Lee, Jae-Hyun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9572187/ https://www.ncbi.nlm.nih.gov/pubmed/36234056 http://dx.doi.org/10.3390/ma15196717

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