Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity

In this study, a piezoelectric micromachined ultrasonic transducer (PMUT) is integrated with a microliter-sized volume-tunable Helmholtz resonator. The passive Helmholtz resonator is constructed using an SU8 photolithography-defined square opening plate as the neck portion, a 3D-printed hollow struc...

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Detalles Bibliográficos
Autores principales: Feng, Guo-Hua, Chen, Wen-Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9572789/
https://www.ncbi.nlm.nih.gov/pubmed/36236571
http://dx.doi.org/10.3390/s22197471

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9572789/
https://www.ncbi.nlm.nih.gov/pubmed/36236571
http://dx.doi.org/10.3390/s22197471

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