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Structural, optical, and magnetic properties of Ag(+), Mn(+) and Ar(+) ions implanted ZnO thin films: effect of implantation dose and stopping energy
Herein, we systematically studied the effect of various excitation processes on the structural, optical, and magnetic properties of ZnO films implanted with 80 keV Ar(+), 110 keV Mn(+), and 190 keV Ag(+) ions. Four different doses of 1 × 10(13), 1 × 10(14), 1 × 10(15), and 2 × 10(16) ions per cm(2)...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9577707/ https://www.ncbi.nlm.nih.gov/pubmed/36321078 http://dx.doi.org/10.1039/d2ra05430b |