Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

We present a site-specific elemental analysis of nano-scale patterns whereby the data acquisition is based on Rutherford backscattering spectrometry (RBS). The analysis builds on probing a large ensemble of identical nanostructures. This ensures that a very good limit of detection can be achieved. I...

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Detalles Bibliográficos
Autores principales: Claessens, Niels, Khan, Zamran Zahoor, Haghighi, Negin Rahnemai, Delabie, Annelies, Vantomme, André, Vandervorst, Wilfried, Meersschaut, Johan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9587986/
https://www.ncbi.nlm.nih.gov/pubmed/36272993
http://dx.doi.org/10.1038/s41598-022-22645-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9587986/
https://www.ncbi.nlm.nih.gov/pubmed/36272993
http://dx.doi.org/10.1038/s41598-022-22645-8

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