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Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry
We present a site-specific elemental analysis of nano-scale patterns whereby the data acquisition is based on Rutherford backscattering spectrometry (RBS). The analysis builds on probing a large ensemble of identical nanostructures. This ensures that a very good limit of detection can be achieved. I...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9587986/ https://www.ncbi.nlm.nih.gov/pubmed/36272993 http://dx.doi.org/10.1038/s41598-022-22645-8 |