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A Novel Defect Inspection System Using Convolutional Neural Network for MEMS Pressure Sensors

Defect inspection using imaging-processing techniques, which detects and classifies manufacturing defects, plays a significant role in the quality control of microelectromechanical systems (MEMS) sensors in the semiconductor industry. However, high-precision classification and location are still cha...

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Detalles Bibliográficos
Autores principales:	Deng, Mingxing, Zhang, Quanyong, Zhang, Kun, Li, Hui, Zhang, Yikai, Cao, Wan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9605631/ https://www.ncbi.nlm.nih.gov/pubmed/36286362 http://dx.doi.org/10.3390/jimaging8100268

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