Temperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation

In piezoelectric transducer applications, it is common to use a unipolar operation signal to avoid switching of the polarisation and the resulting nonlinearities of micro-electromechanical systems. However, semi-bipolar or bipolar operation signals have the advantages of less leakage current, lower...

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Detalles Bibliográficos
Autores principales: Teuschel, Marco, Heyes, Paul, Horvath, Samu, Novotny, Christian, Rusconi Clerici, Andrea
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9606857/
https://www.ncbi.nlm.nih.gov/pubmed/36296058
http://dx.doi.org/10.3390/mi13101705

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9606857/
https://www.ncbi.nlm.nih.gov/pubmed/36296058
http://dx.doi.org/10.3390/mi13101705

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