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Characterization of Ferroelectric Al(0.7)Sc(0.3)N Thin Film on Pt and Mo Electrodes

In the past decade, aluminum scandium nitride (AlScN) with a high Sc content has shown ferroelectric properties, which provides a new option for CMOS-process-compatible ferroelectric memory, sensors and actuators, as well as tunable devices. In this paper, the ferroelectric properties of [Formula: s...

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Detalles Bibliográficos
Autores principales:	Nie, Ran, Shao, Shuai, Luo, Zhifang, Kang, Xiaoxu, Wu, Tao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607415/ https://www.ncbi.nlm.nih.gov/pubmed/36295981 http://dx.doi.org/10.3390/mi13101629

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