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Laser Ultrasound Investigations of AlScN(0001) and AlScN(11-20) Thin Films Prepared by Magnetron Sputter Epitaxy on Sapphire Substrates

The laser ultrasound (LU) technique has been used to determine dispersion curves for surface acoustic waves (SAW) propagating in AlScN/Al(2)O(3) systems. Polar and non-polar Al(0.77)Sc(0.23)N thin films were prepared by magnetron sputter epitaxy on Al(2)O(3) substrates and coated with a metal layer....

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Detalles Bibliográficos
Autores principales:	Mayer, Elena A., Rogall, Olga, Ding, Anli, Nair, Akash, Žukauskaitė, Agnė, Pupyrev, Pavel D., Lomonosov, Alexey M., Mayer, Andreas P.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9607484/ https://www.ncbi.nlm.nih.gov/pubmed/36296051 http://dx.doi.org/10.3390/mi13101698

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