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Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications
Micromachined thermal flow sensors on the market are primarily manufactured with the calorimetric sensing principle. The success has been in limited industries such as automotive, medical, and gas process control. Applications in some emerging and abrupt applications are hindered due to technical ch...
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Formato: | Online Artículo Texto |
Lenguaje: | English |
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MDPI
2022
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608152/ https://www.ncbi.nlm.nih.gov/pubmed/36296082 http://dx.doi.org/10.3390/mi13101729 |
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author | Huang, Liji |
author_facet | Huang, Liji |
author_sort | Huang, Liji |
collection | PubMed |
description | Micromachined thermal flow sensors on the market are primarily manufactured with the calorimetric sensing principle. The success has been in limited industries such as automotive, medical, and gas process control. Applications in some emerging and abrupt applications are hindered due to technical challenges. This paper reviews the current progress with micromachined devices based on the less popular thermal time-of-flight sensing technology: its theory, design of the micromachining process, control schemes, and applications. Thermal time-of-flight sensing could effectively solve some key technical hurdles that the calorimetric sensing approach has. It also offers fluidic property-independent data acquisition, multiparameter measurement, and the possibility for self-calibration. This technology may have a significant perspective on future development. |
format | Online Article Text |
id | pubmed-9608152 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-96081522022-10-28 Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications Huang, Liji Micromachines (Basel) Review Micromachined thermal flow sensors on the market are primarily manufactured with the calorimetric sensing principle. The success has been in limited industries such as automotive, medical, and gas process control. Applications in some emerging and abrupt applications are hindered due to technical challenges. This paper reviews the current progress with micromachined devices based on the less popular thermal time-of-flight sensing technology: its theory, design of the micromachining process, control schemes, and applications. Thermal time-of-flight sensing could effectively solve some key technical hurdles that the calorimetric sensing approach has. It also offers fluidic property-independent data acquisition, multiparameter measurement, and the possibility for self-calibration. This technology may have a significant perspective on future development. MDPI 2022-10-13 /pmc/articles/PMC9608152/ /pubmed/36296082 http://dx.doi.org/10.3390/mi13101729 Text en © 2022 by the author. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Review Huang, Liji Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications |
title | Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications |
title_full | Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications |
title_fullStr | Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications |
title_full_unstemmed | Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications |
title_short | Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications |
title_sort | micromachined thermal time-of-flight flow sensors and their applications |
topic | Review |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608152/ https://www.ncbi.nlm.nih.gov/pubmed/36296082 http://dx.doi.org/10.3390/mi13101729 |
work_keys_str_mv | AT huangliji micromachinedthermaltimeofflightflowsensorsandtheirapplications |