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Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications

Micromachined thermal flow sensors on the market are primarily manufactured with the calorimetric sensing principle. The success has been in limited industries such as automotive, medical, and gas process control. Applications in some emerging and abrupt applications are hindered due to technical ch...

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Detalles Bibliográficos
Autor principal: Huang, Liji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608152/
https://www.ncbi.nlm.nih.gov/pubmed/36296082
http://dx.doi.org/10.3390/mi13101729