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Dynamic Modeling and Attitude Decoupling Control for a 3-DOF Flexible Piezoelectric Nano-Positioning Stage Based on ADRC

The paper proposes a three-degrees-of-freedom flexible nano-positioning stage constructed from compliant flexures and piezoelectric thin-sheet actuators, featuring a compact size and fast dynamic responses, which can be extensively applied to the typical micro/nano-positioning applications. Meanwhil...

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Detalles Bibliográficos
Autores principales:	Chen, Ning, Liu, Xianfu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608762/ https://www.ncbi.nlm.nih.gov/pubmed/36295944 http://dx.doi.org/10.3390/mi13101591

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