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Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer

The development of pressure sensors of high sensitivity and stable robustness over a broad range is indispensable for the future progress of electronic skin applicable to the detection of normal and shear pressures of various dynamic human motions. Herein, we present a flexible capacitive tactile se...

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Autores principales: Yao, Shengjie, Yu, Jianping, Jiang, Xiaoliang, Xu, Junfei, Lan, Kun, Yao, Zhehe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608838/
https://www.ncbi.nlm.nih.gov/pubmed/36296076
http://dx.doi.org/10.3390/mi13101724
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author Yao, Shengjie
Yu, Jianping
Jiang, Xiaoliang
Xu, Junfei
Lan, Kun
Yao, Zhehe
author_facet Yao, Shengjie
Yu, Jianping
Jiang, Xiaoliang
Xu, Junfei
Lan, Kun
Yao, Zhehe
author_sort Yao, Shengjie
collection PubMed
description The development of pressure sensors of high sensitivity and stable robustness over a broad range is indispensable for the future progress of electronic skin applicable to the detection of normal and shear pressures of various dynamic human motions. Herein, we present a flexible capacitive tactile sensing array that incorporates a porous dielectric layer with micro-patterned structures on the surface to enable the sensitive detection of normal and shear pressures. The proposed sensing array showed great pressure-sensing performance in the experiments, with a broad sensing range from several kPa to 150 kPa of normal pressure and 20 kPa of shear pressure. Sensitivities of 0.54%/kPa at 10 kPa and below, 0.45%/kPa between 10 kPa and 80 kPa, and 0.12%/kPa at 80 kPa and above were achieved for normal pressures. Meanwhile, for shear pressures, sensitivities up to 1.14%/kPa and 1.08%/kPa in x and y directions, respectively, and below 10 kPa, 0.73%/kPa, and 0.75%/kPa under shear pressure over 10 kPa were also validated. The performance of the finger-attached sensing array was also demonstrated, demonstrating which was a potential electronic skin to use in all kinds of wearable devices, including prosthetic hands, surgical robots, and other pressure monitoring systems.
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spelling pubmed-96088382022-10-28 Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer Yao, Shengjie Yu, Jianping Jiang, Xiaoliang Xu, Junfei Lan, Kun Yao, Zhehe Micromachines (Basel) Article The development of pressure sensors of high sensitivity and stable robustness over a broad range is indispensable for the future progress of electronic skin applicable to the detection of normal and shear pressures of various dynamic human motions. Herein, we present a flexible capacitive tactile sensing array that incorporates a porous dielectric layer with micro-patterned structures on the surface to enable the sensitive detection of normal and shear pressures. The proposed sensing array showed great pressure-sensing performance in the experiments, with a broad sensing range from several kPa to 150 kPa of normal pressure and 20 kPa of shear pressure. Sensitivities of 0.54%/kPa at 10 kPa and below, 0.45%/kPa between 10 kPa and 80 kPa, and 0.12%/kPa at 80 kPa and above were achieved for normal pressures. Meanwhile, for shear pressures, sensitivities up to 1.14%/kPa and 1.08%/kPa in x and y directions, respectively, and below 10 kPa, 0.73%/kPa, and 0.75%/kPa under shear pressure over 10 kPa were also validated. The performance of the finger-attached sensing array was also demonstrated, demonstrating which was a potential electronic skin to use in all kinds of wearable devices, including prosthetic hands, surgical robots, and other pressure monitoring systems. MDPI 2022-10-12 /pmc/articles/PMC9608838/ /pubmed/36296076 http://dx.doi.org/10.3390/mi13101724 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yao, Shengjie
Yu, Jianping
Jiang, Xiaoliang
Xu, Junfei
Lan, Kun
Yao, Zhehe
Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer
title Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer
title_full Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer
title_fullStr Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer
title_full_unstemmed Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer
title_short Fabrication and Experimental Validation of a Sensitive and Robust Tactile Sensing Array with a Micro-Structured Porous Dielectric Layer
title_sort fabrication and experimental validation of a sensitive and robust tactile sensing array with a micro-structured porous dielectric layer
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9608838/
https://www.ncbi.nlm.nih.gov/pubmed/36296076
http://dx.doi.org/10.3390/mi13101724
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