Cargando…

AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere

[Image: see text] The influence of H(2) flooding on the development of surface roughness during time-of-flight secondary ion mass spectrometry (ToF-SIMS) depth profiling was studied to evaluate the different aspects of a H(2) atmosphere in comparison to an ultrahigh vacuum (UHV) environment. Multila...

Descripción completa

Detalles Bibliográficos
Autores principales: Ekar, Jernej, Kovač, Janez
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609309/
https://www.ncbi.nlm.nih.gov/pubmed/36239688
http://dx.doi.org/10.1021/acs.langmuir.2c01837
_version_ 1784818986682155008
author Ekar, Jernej
Kovač, Janez
author_facet Ekar, Jernej
Kovač, Janez
author_sort Ekar, Jernej
collection PubMed
description [Image: see text] The influence of H(2) flooding on the development of surface roughness during time-of-flight secondary ion mass spectrometry (ToF-SIMS) depth profiling was studied to evaluate the different aspects of a H(2) atmosphere in comparison to an ultrahigh vacuum (UHV) environment. Multilayer samples, consisting of different combinations of metal, metal oxide, and alloy layers of different elements, were bombarded with 1 and 2 keV Cs(+) ion beams in UHV and a H(2) atmosphere of 7 × 10(–7) mbar. The surface roughness S(a) was measured with atomic force microscopy (AFM) on the initial surface and in the craters formed while sputtering, either in the middle of the layers or at the interfaces. We found that the roughness after Cs(+) sputtering depends on the chemical composition/structure of the individual layers, and it increases with the sputtering depth. However, the increase in the roughness was, in specific cases, approximately a few tens of percent lower when sputtering in the H(2) atmosphere compared to the UHV. In the other cases, the average surface roughness was generally still lower when H(2) flooding was applied, but the differences were statistically insignificant. Additionally, we observed that for the initially rough surfaces with an S(a) of about 5 nm, sputtering with the 1 keV Cs(+) beam might have a smoothing effect, thereby reducing the initial roughness. Our observations also indicate that Cs(+) sputtering with ion energies of 1 and 2 keV has a similar effect on roughness development, except for the cases with initially very smooth samples. The results show the beneficial effect of H(2) flooding on surface roughness development during the ToF-SIMS depth profiling in addition to a reduction of the matrix effect and an improved identification of thin layers.
format Online
Article
Text
id pubmed-9609309
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher American Chemical Society
record_format MEDLINE/PubMed
spelling pubmed-96093092022-10-28 AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere Ekar, Jernej Kovač, Janez Langmuir [Image: see text] The influence of H(2) flooding on the development of surface roughness during time-of-flight secondary ion mass spectrometry (ToF-SIMS) depth profiling was studied to evaluate the different aspects of a H(2) atmosphere in comparison to an ultrahigh vacuum (UHV) environment. Multilayer samples, consisting of different combinations of metal, metal oxide, and alloy layers of different elements, were bombarded with 1 and 2 keV Cs(+) ion beams in UHV and a H(2) atmosphere of 7 × 10(–7) mbar. The surface roughness S(a) was measured with atomic force microscopy (AFM) on the initial surface and in the craters formed while sputtering, either in the middle of the layers or at the interfaces. We found that the roughness after Cs(+) sputtering depends on the chemical composition/structure of the individual layers, and it increases with the sputtering depth. However, the increase in the roughness was, in specific cases, approximately a few tens of percent lower when sputtering in the H(2) atmosphere compared to the UHV. In the other cases, the average surface roughness was generally still lower when H(2) flooding was applied, but the differences were statistically insignificant. Additionally, we observed that for the initially rough surfaces with an S(a) of about 5 nm, sputtering with the 1 keV Cs(+) beam might have a smoothing effect, thereby reducing the initial roughness. Our observations also indicate that Cs(+) sputtering with ion energies of 1 and 2 keV has a similar effect on roughness development, except for the cases with initially very smooth samples. The results show the beneficial effect of H(2) flooding on surface roughness development during the ToF-SIMS depth profiling in addition to a reduction of the matrix effect and an improved identification of thin layers. American Chemical Society 2022-10-14 2022-10-25 /pmc/articles/PMC9609309/ /pubmed/36239688 http://dx.doi.org/10.1021/acs.langmuir.2c01837 Text en © 2022 The Authors. Published by American Chemical Society https://creativecommons.org/licenses/by/4.0/Permits the broadest form of re-use including for commercial purposes, provided that author attribution and integrity are maintained (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Ekar, Jernej
Kovač, Janez
AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere
title AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere
title_full AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere
title_fullStr AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere
title_full_unstemmed AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere
title_short AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere
title_sort afm study of roughness development during tof-sims depth profiling of multilayers with a cs(+) ion beam in a h(2) atmosphere
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609309/
https://www.ncbi.nlm.nih.gov/pubmed/36239688
http://dx.doi.org/10.1021/acs.langmuir.2c01837
work_keys_str_mv AT ekarjernej afmstudyofroughnessdevelopmentduringtofsimsdepthprofilingofmultilayerswithacsionbeaminah2atmosphere
AT kovacjanez afmstudyofroughnessdevelopmentduringtofsimsdepthprofilingofmultilayerswithacsionbeaminah2atmosphere