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AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs(+) Ion Beam in a H(2) Atmosphere
[Image: see text] The influence of H(2) flooding on the development of surface roughness during time-of-flight secondary ion mass spectrometry (ToF-SIMS) depth profiling was studied to evaluate the different aspects of a H(2) atmosphere in comparison to an ultrahigh vacuum (UHV) environment. Multila...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609309/ https://www.ncbi.nlm.nih.gov/pubmed/36239688 http://dx.doi.org/10.1021/acs.langmuir.2c01837 |