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Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices
In order to further improve the degree of frequency response of the surface acoustic wave (SAW) sensor for gas detection, the structure of the forked-finger transducer was analyzed, and its optimal structural parameters were simulated and designed. The simulation model of the unidirectional fork-fin...
Autores principales: | Bin, Shen, Yang, Haiyang, Jiang, Leiming, Liu, Xinlei |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9609663/ https://www.ncbi.nlm.nih.gov/pubmed/36295996 http://dx.doi.org/10.3390/mi13101643 |
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