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PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm

We proposed a PZT-film-based piezoelectric micromachined ultrasonic transducer (pMUT) with an I-shaped composite diaphragm to improve the sensitivity and resonant frequency of pMUTs with the same diaphragm area. The finite element method (FEM) simulation results indicated that the pMUT with an I-sha...

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Detalles Bibliográficos
Autores principales:	Yu, Qing, Fan, Guoxiang, Ren, Wei, Fan, Qingqing, Ti, Jinming, Li, Junhong, Wang, Chenghao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9610712/ https://www.ncbi.nlm.nih.gov/pubmed/36295950 http://dx.doi.org/10.3390/mi13101597

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