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A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles

The response time is an important parameter for thermopiles sensors, which reflects the response speed of the device. The accurate measurement of response time is extremely important to evaluate device characteristics for using them in suitable scenarios. In this work, to accurately measure the resp...

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Detalles Bibliográficos
Autores principales: Xiang, Zeqing, Shi, Meng, Zhou, Na, Zhang, Chenchen, Ding, Xuefeng, Ni, Yue, Chen, Dapeng, Mao, Haiyang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9610767/
https://www.ncbi.nlm.nih.gov/pubmed/36296070
http://dx.doi.org/10.3390/mi13101717