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Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications

Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topolog...

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Detalles Bibliográficos
Autores principales:	Goel, Chirag, Cicek, Paul-Vahe, Robichaud, Alexandre
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9611390/ https://www.ncbi.nlm.nih.gov/pubmed/36295951 http://dx.doi.org/10.3390/mi13101598

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