Structural Optimization and MEMS Implementation of the NV Center Phonon Piezoelectric Device

The nitrogen-vacancy (NV) center of the diamond has attracted widespread attention because of its high sensitivity in quantum precision measurement. The phonon piezoelectric device of the NV center is designed on the basis of the phonon-coupled regulation mechanism. The propagation characteristics and acoustic wave excitation modes of the phonon piezoelectric device are analyzed. In order to improve the performance of phonon-coupled manipulation, the influence of the structural parameters of the diamond substrate and the ZnO piezoelectric layer on the phonon propagation characteristics are analyzed. The structure of the phonon piezoelectric device of the NV center is optimized, and its Micro-Electro-Mechanical System (MEMS) implementation and characterization are carried out. Research results show that the phonon resonance manipulation method can effectively increase the NV center’s spin transition probability using the MEMS phonon piezoelectric device prepared in this paper, improving the quantum spin manipulation efficiency.