Direct glass-to-glass bonding obtained via simplified ammonia-based low-temperature procedure resists high shear stress and powerful CW fiber laser irradiation

Direct glass-to-glass bonding is important for high-technology components in optics, microfluidics, and micro-electromechanical systems applications. We studied direct bonding of 1 mm thick soda-lime float glass substrates. The process is based on the classic RCA-1 cleaning procedure from the semico...

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Detalles Bibliográficos
Autores principales: Zhou, Jansen, Mei, Nanqin, Leonenko, Zoya, Zhou, Norman, Mayer, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2022
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9615841/
https://www.ncbi.nlm.nih.gov/pubmed/36349006
http://dx.doi.org/10.1039/d2ra04234g

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9615841/
https://www.ncbi.nlm.nih.gov/pubmed/36349006
http://dx.doi.org/10.1039/d2ra04234g

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