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Direct glass-to-glass bonding obtained via simplified ammonia-based low-temperature procedure resists high shear stress and powerful CW fiber laser irradiation
Direct glass-to-glass bonding is important for high-technology components in optics, microfluidics, and micro-electromechanical systems applications. We studied direct bonding of 1 mm thick soda-lime float glass substrates. The process is based on the classic RCA-1 cleaning procedure from the semico...
Autores principales: | Zhou, Jansen, Mei, Nanqin, Leonenko, Zoya, Zhou, Norman, Mayer, Michael |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9615841/ https://www.ncbi.nlm.nih.gov/pubmed/36349006 http://dx.doi.org/10.1039/d2ra04234g |
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