Machine Learning and Swarm Optimization Algorithm in Temperature Compensation of Pressure Sensors

The main temperature compensation method for MEMS piezoresistive pressure sensors is software compensation, which processes the sensor data using various algorithms to improve the output accuracy. However, there are few algorithms designed for sensors with specific ranges, most of which ignore the operating characteristics of the sensors themselves. In this paper, we propose three temperature compensation methods based on swarm optimization algorithms fused with machine learning for three different ranges of sensors and explore the partitioning ratio of the calibration dataset on Sensor A. The results show that different algorithms are suitable for pressure sensors of different ranges. An optimal compensation effect was achieved on Sensor A when the splitting ratio was 33.3%, where the zero-drift coefficient was 2.88 × 10(−7)/°C and the sensitivity temperature coefficient was 4.52 × 10(−6)/°C. The algorithms were compared with other algorithms in the literature to verify their superiority. The optimal segmentation ratio obtained from the experimental investigation is consistent with the sensor operating temperature interval and exhibits a strong innovation.