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Femtosecond Laser Fabrication of Anisotropic Structures in Phosphorus- and Boron-Doped Amorphous Silicon Films

Femtosecond laser-modified amorphous silicon (a-Si) films with optical and electrical anisotropy have perspective polarization-sensitive applications in optics, photovoltaics, and sensors. We demonstrate the formation of one-dimensional femtosecond laser-induced periodic surface structures (LIPSS) o...

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Detalles Bibliográficos
Autores principales:	Shuleiko, Dmitrii, Zabotnov, Stanislav, Martyshov, Mikhail, Amasev, Dmitrii, Presnov, Denis, Nesterov, Vyacheslav, Golovan, Leonid, Kashkarov, Pavel
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9654927/ https://www.ncbi.nlm.nih.gov/pubmed/36363204 http://dx.doi.org/10.3390/ma15217612

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