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Design and Optimization for a New XYZ Micropositioner with Embedded Displacement Sensor for Biomaterial Sample Probing Application
An XYZ compliant micropositioner has been widely mentioned in precision engineering, but the displacements in the X, Y, and Z directions are often not the same. In this study, a design and optimization for a new XYZ micropositioner are developed to obtain three same displacements in three axes. The...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9655923/ https://www.ncbi.nlm.nih.gov/pubmed/36365907 http://dx.doi.org/10.3390/s22218204 |