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Effect of Substrate Temperature on the Structural, Optical and Electrical Properties of DC Magnetron Sputtered VO(2) Thin Films

This study focuses on the effect of the substrate temperature (T(S)) on the quality of VO(2) thin films prepared by DC magnetron sputtering. T(S) was varied from 350 to 600 °C and the effects on the surface morphology, microstructure, optical and electrical properties of the films were investigated....

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Detalles Bibliográficos
Autores principales:	Zhang, Chunzi, Gunes, Ozan, Wen, Shi-Jie, Yang, Qiaoqin, Kasap, Safa
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9657141/ https://www.ncbi.nlm.nih.gov/pubmed/36363441 http://dx.doi.org/10.3390/ma15217849

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