Cathodoluminescence Spectroscopy in Graded In(x)Ga(1−x)N

InGaN materials are widely used in optoelectronic devices due to their excellent optical properties. Since the emission wavelength of the full-composition-graded In(x)Ga(1−x)N films perfectly matches the solar spectrum, providing a full-spectrum response, this makes them suitable for the manufacturing of high-efficiency optoelectronic devices. It is extremely important to study the optical properties of materials, but there are very few studies of the luminescence of full-composition-graded In(x)Ga(1−x)N ternary alloy. In this work, the optical properties of full-composition-graded In(x)Ga(1−x)N films are studied by cathodoluminescence (CL). The CL spectra with multiple luminescence peaks in the range of 365–1000 nm were acquired in the cross-sectional and plan-view directions. The CL spectroscopy studies were carried out inside and outside of microplates formed under the indium droplets on the InGaN surface, which found that the intensity of the light emission peaks inside and outside of microplates differed significantly. Additionally, the paired defects structure is studied by using the spectroscopic method. A detailed CL spectroscopy study paves the way for the growth and device optimization of high-quality, full-composition-graded In(x)Ga(1−x)N ternary alloy materials.