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Atomic-Layer-Deposited Aluminum Oxide Thin Films Probed with X-ray Scattering and Compared to Molecular Dynamics and Density Functional Theory Models

[Image: see text] A better understanding of amorphous aluminum oxide’s structure and electronic properties is obtained through combined experimental and computational approaches. Grazing incidence X-ray scattering measurements were carried out on aluminum oxide thin films grown using thermal atomic...

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Detalles Bibliográficos
Autores principales:	Pugliese, Anthony, Shyam, Badri, Repa, Gil M., Nguyen, Anh Hung, Mehta, Apurva, Webb III, Edmund B., Fredin, Lisa A., Strandwitz, Nicholas C.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2022
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9670265/ https://www.ncbi.nlm.nih.gov/pubmed/36406558 http://dx.doi.org/10.1021/acsomega.2c04402

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