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Ultra-low detection limit chemoresistive NO(2) gas sensor using single transferred MoS(2) flake: an advanced nanofabrication

In this work, a method of fabricating a NO(2) nano-sensor working at room temperature with a low detectable concentration limit is proposed. A 2D-MoS(2) flake is isolated by transferring a single MoS(2) flake to SiO(2)/Si substrate, followed by applying an advanced e-beam lithography (EBL) to form a...

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Detalles Bibliográficos
Autores principales: Hong, Hoang Si, Hoang, Tran Vinh, Huong, Nguyen Thanh, Nam, Nguyen Hoang, Thinh, Dao Duc, Hue, Nguyen Thi, Thuan, Nguyen Duc
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9679951/
https://www.ncbi.nlm.nih.gov/pubmed/36425159
http://dx.doi.org/10.1039/d2ra06228c

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