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Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor

[Image: see text] In order to investigate the optimization of the performance and structure of a tungsten crucible CVD reactor, the CFD simulation method was used in this paper to simulate the internal flow of the tungsten crucible CVD reactor. The velocity distribution and temperature distribution...

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Detalles Bibliográficos
Autores principales:	Peng, Lipei, Dong, Han, Li, Shaobo, Wang, Zhanwei, Meng, Xiangjun, Wang, Yafeng, Liu, Tengshi, Li, Xiangyu, Ji, Jialiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2022
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9685600/ https://www.ncbi.nlm.nih.gov/pubmed/36440118 http://dx.doi.org/10.1021/acsomega.2c04037

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