Pile-Ups Formation in AFM-Based Nanolithography: Morpho-Mechanical Characterization and Removal Strategies

In recent decades, great efforts have been made to develop innovative, effective, and accurate nanofabrication techniques stimulated by the growing demand for nanostructures. Nowadays, mechanical tip-based emerged as the most promising nanolithography technique, allowing the pattern of nanostructure...

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Detalles Bibliográficos
Autores principales: Pellegrino, Paolo, Farella, Isabella, Cascione, Mariafrancesca, De Matteis, Valeria, Bramanti, Alessandro Paolo, Vincenti, Lorenzo, Della Torre, Antonio, Quaranta, Fabio, Rinaldi, Rosaria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9692810/
https://www.ncbi.nlm.nih.gov/pubmed/36422411
http://dx.doi.org/10.3390/mi13111982

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9692810/
https://www.ncbi.nlm.nih.gov/pubmed/36422411
http://dx.doi.org/10.3390/mi13111982

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