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Breakage Ratio of Silicon Wafer during Fixed Diamond Wire Sawing

Monocrystalline silicon is an important material for processing electronic and photovoltaic devices. The fixed diamond wire sawing technology is the first key technology for monocrystalline silicon wafer processing. A systematic study of the relationship between the fracture strength, stress and bre...

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Detalles Bibliográficos
Autores principales: Liu, Tengyun, Su, Yancai, Ge, Peiqi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9692905/
https://www.ncbi.nlm.nih.gov/pubmed/36363919
http://dx.doi.org/10.3390/mi13111895