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Breakage Ratio of Silicon Wafer during Fixed Diamond Wire Sawing
Monocrystalline silicon is an important material for processing electronic and photovoltaic devices. The fixed diamond wire sawing technology is the first key technology for monocrystalline silicon wafer processing. A systematic study of the relationship between the fracture strength, stress and bre...
Autores principales: | Liu, Tengyun, Su, Yancai, Ge, Peiqi |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9692905/ https://www.ncbi.nlm.nih.gov/pubmed/36363919 http://dx.doi.org/10.3390/mi13111895 |
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